FreePDK45:ImplantRules
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Rule
Value
Description
IMPLANT.1
70 nm
Minimum
spacing
of
nimplant
/
pimplant
to channel
IMPLANT.2
25 nm
Minimum
spacing
of
nimplant
/
pimplant
to
contact
IMPLANT.3/4
45 nm
Minimum
width
/
spacing
of
nimplant
/
pimplant
IMPLANT.5
none
Nimplant and pimplant must not overlap
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